发明名称 PROCEDE D'ISOLATION PHYSIQUE DE REGIONS D'UNE PLAQUE DE SUBSTRAT
摘要 Process for physical isolation of regions (110) of a substrate board (100) comprising the following steps:a) formation of trenches (106) in the substrate, delimiting regions of the substrate (110),b) placement of a liquid bonding material (120) in the trenches, which can solidify and bond to the substrate board (100) when in the solid state,c) solidification of the bonding material.Application to isolation of electronic, optical, mechanical or magnetic components.
申请公布号 FR2782843(B1) 申请公布日期 2000.09.29
申请号 FR19980010687 申请日期 1998.08.25
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 GIDON PIERRE
分类号 H01L21/02;H01L21/762;H01L21/764;H01L29/06 主分类号 H01L21/02
代理机构 代理人
主权项
地址