| 摘要 |
PROBLEM TO BE SOLVED: To provide a wring structure, provided with economically formable constitution for raising the degree of freedom in terms of layout design, an inductor and the formation method. SOLUTION: A multilayer inductor 60 is provided with an inductor 64 of a first layer 64, an inductor 66 of a second layer formed on the inductor of the first layer via a first interlayer insulating film and an inductor 72 of a third layer formed on the inductor of the second layer via a second interlayer insulating film. The inductor of the first layer is connected via a contact 76, passing through the first interlayer insulating film to the inductor of the second layer. The inductor of the second layer is connected via the contact 78 passing through the second interlayer insulating film to the inductor of a third layer. For the inductor of the third layer, a coil winding overstrides a connection wiring 74 with an air bridge structure. The connection wiring is passed under the coil winding and discharged to the outside of the multilayer inductor, without electrically contacting the coil winding from the connection end of the center part of the coil winding.
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