| 摘要 |
PROBLEM TO BE SOLVED: To prevent the visual examination time from being affected by the time required in the focusing to an object to be inspected. SOLUTION: The visual examination apparatus is constituted so as to store the displacement data in the height direction of each of printed circuit boards 8 at the sampling point A thereof, during the feed of a plurality of the printed circuit boards 8 placed on a substrate pallet 9 in a substrate feed part 1 before visual examination to control an image picking up optical system 14 in a Z-axis direction on the basis of the displacement data in the height wise direction of each printed circuit board 8 at the sampling point A thereof preliminarily stored during a period, before the printed circuit board 8 is brought to an inspection position to hold a focal position.
|
