| 摘要 |
PROBLEM TO BE SOLVED: To achieve excellent control of intervals between lenses and to prevent the absence of lens formation that is resulted from fusion of lenses, by forming microlenses on light-receiving parts selected in a checkered pattern from a plurality of light-receiving parts and subsequently forming microlenses on the other micro lenses. SOLUTION: In a first step, a pattern 8 serving as microlenses is formed according to photolithography method using resist for a microlens. In this case, the pattern 8 is formed on color filters 5 of light-receiving parts 2, which are selected in a checkered pattern from a plurality of the light-receiving parts 2. And then, micro lenses 10 are formed by a heating operation at 160 deg.C. Subsequently, in a second step, a pattern 9 is formed in the same manner on the color filters 5 of the other light-receiving parts 2. According to this method, melting, curing, and so on change the characteristics of the micro lenses 10 formed in the first step, and expansion hardly occurs in the second step. Thus, fusion is unlikely to appear on the lenses under the same heating conditions.
|
