| 摘要 |
PROBLEM TO BE SOLVED: To maintain a process unit structure, where a plurality of process units are provided in series without sliding the process unit. SOLUTION: A utility unit 3 is enclosed with a frame 31 so that the entire forms the same rectangular parallelepiped as a process block, a lower part is a space for a heavy power source box 32, piping, and wiring, a transportation unit 33 is provided in the middle stage for delivery of objects to be processed such as semiconductor wafer to/from an adjacent process block, and a shelf 34 is provided above the transportation unit 33 on which chemical bottles and replacement parts are placed. At maintenance, an operator enters the space between process units 2 and 2 from a side with no utility unit 3 arranged. |
