| 摘要 |
PROBLEM TO BE SOLVED: To obtain a laser-beam irradiation apparatus which prevents a laser beam reflected by an object to be irradiated from advancing reversely in an optical path and which can be operated normally, by a method wherein a support base which supports the object to be irradiated supports the object, to be irradiated, in such a way that the irradiation face of the object to be irradiated has an angle difference with reference to a direction at right angles to the center line of a laser luminous flux. SOLUTION: A substrate 17 is supported by a substrate support base 16 in such a way that its irradiation face is tilted with reference to a direction at right angles to the center line of a laser beam 20. A mirror 14 is installed in such a way that a reflected beam advances directly below. A condensing lens 15 is arranged horizontally just under the mirror 14. The laser beam 20 which is outputted from a laser-beam output part 1 and which is reflected by the mirror 14 advances directly below, it is condensed by the condensing lens 15 which is installed horizontally, and the substrate 17 is irradiated at an angle of incidence according to the angle of inclination of the substrate 17. As a result, a reflected laser beam 20a deviates gradually from an optical path as it advances. As a result, a bad effect due to the reflected laser beam 20a is prevented surely, and the malfunction of this laser-beam irradiation apparatus is prevented.
|
