摘要 |
PROBLEM TO BE SOLVED: To provide a transparent conductive film having reduction resistance, translucency and conductivity, and useful for an anode conductor for a FED. SOLUTION: As for this transparent conductive film, the enclosure 2 of a FED 1 comprises a cathode base 3 and an anode base 4. There is an anode 7 comprising an anode conductor 5 and a phosphor layer 6 on the inner surface of the anode base 4. The anode conductor 5 comprises a first layer 8 of ITO being in contact with the inner surface of the anode base 4 and a second layer 9 of ZnO:Al. Since ZnO has translucency and conductivity, and is also stable as an oxide, it is not easily reducible (reduction resistance) even in a reductive atmosphere. It is excellent in particular in translucency and conductivity because of a proper amount of Al added. A field emission element 10 is provided on the inner surface of the cathode base 3 as a cathode serving as an electron source. The ITO easily reducible is coated and protected by the second layer 9 of a thin Al film. Even if the inside of the enclosure is kept in a reductive atmosphere in a manufacturing process of the FED, no disadvantage of depositing In by reduction of the ITO of the anode conductor is caused.
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