发明名称 SMIF CONTAINER INCLUDING A RETICLE SUPPORT STRUCTURE
摘要 A reticle support mechanism (100, 110) is disclosed in which a reticle (127) may be quickly and easily located and removed, and which is capable of securely supporting a reticle for storage and/or transport. A preferred embodiment of the present invention includes a pair of reticle supports (112) mounted to a door (104) of a container, and a pair of reticle retainers (114) mounted to a shell (102) of the container. When the container shell is coupled with the container door, sections of the reticle support and reticle retainer engage chamfered edges of the reticle and sandwich the reticle in a secure position within the container.
申请公布号 WO0056633(A1) 申请公布日期 2000.09.28
申请号 WO2000US06818 申请日期 2000.03.15
申请人 ASYST TECHNOLOGIES, INC. 发明人 FOSNIGHT, WILLIAM, J.;MARTIN, RAYMOND, S.;SHENK, JOSHUA, W.;WARTENBERGH, ROBERT, P.
分类号 G03F7/20;(IPC1-7):B65D85/48 主分类号 G03F7/20
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