发明名称 |
CORRUGATED STYLE ANODE ELEMENT FOR ION PUMPS |
摘要 |
An ion pump anode eliminates the intercellular spaces while maintaining an efficient cell shape in which the plasma sheath follows the contour of the cell wall. The cells are preferably quasi-cylindrical and can be manufactured by folding one or more metal strip into a corrugation and welding the strip to create separate cells. By eliminating the intercellular region, which supports a high plasma density, the formation of dendrites under such a region is prevented and instabilities caused by those dendrites are eliminated.
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申请公布号 |
WO0057452(A2) |
申请公布日期 |
2000.09.28 |
申请号 |
WO2000EP02550 |
申请日期 |
2000.03.17 |
申请人 |
FEI COMPANY |
发明人 |
MCGINN, JAMES, B.;SPAGNOL, MIRIAM |
分类号 |
B01J3/00;H01J41/20;(IPC1-7):H01J41/20 |
主分类号 |
B01J3/00 |
代理机构 |
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代理人 |
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主权项 |
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