发明名称 PRODUCTION OF SPHERICAL SILICA POWDER
摘要 PROBLEM TO BE SOLVED: To readily produce a spherical silica powder having a large average particle diameter while enhancing the sphericity. SOLUTION: This method for producing spherical silica powder by jetting a raw material for the silica powder into a flame comprises mixing the raw material for the silica powder having a particle distribution of 20-80μm average particle diameter d50, >=10μm 10%-accumulated particle diameter d10 and <=5 ratio of d90/d10 (d90 is the 90%-accumulated particle diameter), with a carrier gas, and jetting the mixed materials at 5-40 m/s gas flow rate. Especially, the raw material for the silica powder is jetted between the inner flame and the outer flame.
申请公布号 JP2000264622(A) 申请公布日期 2000.09.26
申请号 JP19990065066 申请日期 1999.03.11
申请人 DENKI KAGAKU KOGYO KK 发明人 ZENBA KIYONARI;MIZUTANI SUSUMU;KOBAYASHI AKIRA
分类号 H01L23/29;C01B33/18;H01L23/31;(IPC1-7):C01B33/18 主分类号 H01L23/29
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