发明名称 |
Semiconductor type pressure sensor |
摘要 |
A pressure sensor superior in pressure resistance and capable of covering from a low to high pressure range as a measuring range is to be provided. Plural pressure sensing sections for high and low pressures are formed on a silicon board, the pressure sensing sections each com ing an outer frame portion, a diaphragm portion, a strain gauge portion and an electrode portion. The silicon board side with the strain gauge portions formed thereon and an insulating substrate having electrode take-out portions are bonded together in such a manner that the strain gauge portions are hermetically sealed and that the electrode portions on the silicon board and the electrode take-out portions of the insulating substrate are electrically connected with each other, to constitute a pressure sensing unit. The pressure sensing unit, a low-melting glass and a stem are laminated together in such a manner that lead pins are electrically bonded by solder to the electrode portions of the silicon board through the electrode take-out portions of the insulating substrate. In this state, the low-melting glass is melted to bond the pressure sensing unit and the stem with each other.
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申请公布号 |
US6122974(A) |
申请公布日期 |
2000.09.26 |
申请号 |
US19980139273 |
申请日期 |
1998.08.25 |
申请人 |
HITACHI, LTD.;HITACHI CAR ENGINEERING CO., LTD. |
发明人 |
SATO, SHINYA;SUZUKI, SEIKOU;YAMAGUCHI, SHINICHI;SASADA, YOSHIYUKI;MIKI, MASAYUKI;KUBOTA, MASANORI;MIYAZAKI, ATSUSHI |
分类号 |
G01L9/04;G01L9/00;(IPC1-7):G01L9/00;G01L7/08 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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