SEMICONDUCTOR MICROVALVE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor microvalve allowing low power consumption. SOLUTION: A valve port 10a is penetratedly provided on a silicon substrate 10. A flexible portion 22 is provided with a movable piece 22a comprising silicon provided with a valve element 23 at a center portion and the movable piece 22a constitutes a first bimetal element. A second bimetal element 24 is laminated on a predetermined position between the valve element 23 and a peripheral portion 22c in the movable piece 22a through an insulation layer 26. A bimetal is constituted by the first bimetal element and the second bimetal element 24. A wiring 27b as an energization means for only energizing to the second bimetal element 24 is connected to the bimetal element 24. An insulation layer 26 interposed between the first bimetal element and the second bimetal element 24 electrically and thermally insulates the first bimetal element from the second bimetal element 24.