发明名称 Light source device
摘要 A light source device has a first mirror for reflecting light emitted by a light source, and a second mirror for reflecting the light reflected by the first mirror and guiding the reflected light toward the irradiation target portion. The first mirror has a curved reflection surface having an elliptic or parabolic shape in section along the optical axis direction. The light source is set at the position of a focal point of the elliptic or parabolic shape of the curved reflection surface. The second mirror has a linear reflection surface which has a linear shape in section along the optical axis direction and faces the curved reflection surface of the first mirror.
申请公布号 US6123429(A) 申请公布日期 2000.09.26
申请号 US19980079290 申请日期 1998.05.15
申请人 TOKYO ELECTRON LIMITED 发明人 OSAWA, TETSU
分类号 F21V7/00;F21V7/08;F21V7/09;F21V8/00;F21V13/04;F21V14/02;F21V19/02;G02B27/00;(IPC1-7):G02B5/10;H01J5/16 主分类号 F21V7/00
代理机构 代理人
主权项
地址