VERTICAL FUSE AND METHOD OF FABRICATION

摘要

PURPOSE: A vertical fuse and fabrication method is prvided for reducing the area occupied by fuses on a semiconductor chip, and for adjusting the fuse resistance for the fuses in a semiconductor device. CONSTITUTION: A fuse for semiconductor devices includes a substrate having a conductive path disposed on a surface thereof, a dielectric layer disposed on the substrate and a vertical fuse disposed perpendicularly to the surface through the dielectric layer and connecting to the conductive path, the vertical fuse forming a cavity having a liner material disposed along vertical surfaces of the cavity, the vertical surfaces being melted to blow the fuse.