| 摘要 |
PROBLEM TO BE SOLVED: To test an LSI chip in a short time even when the number of terminals thereof is increased by measuring the current flowing through a power supply terminal, comparing the measured current with a predetermined value and deciding whether an output buffer is normal or abnormal. SOLUTION: Output current is measured for a plurality of output buffers mounted on an LSI chip. The LSI chip 1 to be measured has a plurality of output buffers 11, 12, 13 of CMOS inverter type and corresponding output terminals 14, 15, 16. The IC chip 1 is further provided with a power supply terminal 17 dedicated for VDD power supply to the output buffers 11, 12, 13, a GND terminal 18 dedicated for the output buffers 11, 12, 13, and a power supply terminal 19 dedicated for VDD power supply to an inner circuit 25, e.g. a memory. An LSI tester comprises an ammeter 20, and variable voltage sources 21, 22, 23, 24.
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