| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substance identification apparatus by which an unknown substance can be identified quickly and simply. SOLUTION: The same position of a sample 2 on a sample stage 1 is irradiated simultaneously with an electron beam or X-rays (a) and infrared rays (b). Secondary X-rays (c), (e) which are generated in the sample 2 at this time are detected by X-ray detectors 5, 10. Reflected infrared rays (d) or transmitted infrared rays (f) which are generated in the sample 2 are detected by infrared detectors 8, 11. Outputs of the respective detectors 5, 10, 8, 11 are processed respectively by a secondary-X-ray-signal processing part 12 and an FT-IR-signal processing part 13. On the basis of their signal processed results, the sample 2 is identified.</p> |
