| 摘要 |
PROBLEM TO BE SOLVED: To provide a ferroelectrics capacitor which is easily manufactured, and has less leak current while fatigue characteristics and imprint characteristics are improved, by allowing a ferroelectrics capacitor insulating film to comprise Pb(Rz,Ti)O3 which contains excessive Pb. SOLUTION: A ferroelectrics capacitor comprises a lower-side electrode 32 comprising Pt film formed on an Si substrate 31, a ferroelectrics capacitor insulating film 33 comprising Pb(Zr,Ti)O3 formed on the lower-side electrode 32, and an upper part electrode 34 formed on the ferroelectrics capacitor 33. Thus, ferroelectrics capacitor film 33 comprises Pb by a range of 1.04-1.12, in Pb/(Zr+Ti) ratio, with a range of 1.07-1.09 preferred, which optimizes the amount of Pb present in the grain boundary in the ferroelectrics capacitor insulating film 33. Thus, with no damage to the leak current characteristics, the fatigue characteristics of ferroelectrics capacitor is improved. |
