HEATING AND COOLING DEVICE AND ELECTRICAL CHARACTERISTIC EVALUATION DEVICE

摘要

PROBLEM TO BE SOLVED: To continuously shift a sample temperature from a low temperature to a high temperature. SOLUTION: This device is constructed of a heater 3 heating a sample 7 and a cooling unit 1 provided with a coolant pipe 2, through which coolant for cooling the sample 7 flows, and a coolant controlling means controlling a flow rate of the coolant flowing through the coolant pipe 2 and formed integrally with the heater 3. The heater 3 is constructed of a linear heater wire, and the heater wire and the coolant pipe 2 are arranged on the same plane and installed inside a vacuum container. A probe feeding electric current or voltage to the sample 7 when the heating and cooling device is brought into contact with the sample 7 surface for measuring an electrical characteristic of the sample 7 is arranged, and the probe is a coaxial type probe for vacuum.