| 摘要 |
PROBLEM TO BE SOLVED: To produce a large-sized liquid crystal display device at low cost with good yield by constituting an exposing light beam of band-like parallel beams and making it perpendicularly incident on a photomask by a reflection mirror optical system. SOLUTION: After adjusting the light beam of an ultraviolet laser 7 by an attenuator 8, beam width is extended to target one by using a cylindrical lens for converging 9. A trimming device 10 for shaping beam shape is installed midway. Then, the band-like parallel beams are formed by using a cylindrical lens for a collimator 11. The light quantity is averaged by a counter double prism 12. The band-like parallel beams 13 are bent by 90 degrees in terms of its advancing direction by a 45-degree reflection mirror 14 arranged in parallel with the photomask 1 and made perpendicularly incident on the photomask 1 and the glass base plate 2. Then, the mirror 14 is moved in parallel with the photomask.
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