| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor good in the adhesion to a substrate and using an oxide semiconductor membrane good in response sensitivity in its element part. SOLUTION: A gas-sensitive element 4 comprising a binary oxide semiconductor based on SnO2 and Zn containing Zn2SnO4 is formed on the comb-tooth electrode formed on an alumina substrate. A thick or thin film heater for controlling element characteristics is built in the alumina substrate. A metal such as Pd, Pt, Co, Cu or Au can be added to the binary oxide semiconductor for the purpose of enhancing detection sensitivity.
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