EXCIMER LAMP, EXCIMER IRRADIATION DEVICE, AND ORGANIC COMPOND DECOMPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a flat type excimer lamp capable of efficiently performing irradiation of excimer beam, an excimer irradiation device, and an organic compound decomposition method. SOLUTION: The excimer lamp has at least a thin box type discharger chamber 2 made of a dielectric with high light transmitting capability and having a large area excimer irradiation surface 3; discharging sealing gas 5 filled in the discharge chamber 2; and an installed electrode 4 arranged on the surface of the discharge chamber 2 on the opposite side to the excimer irradiation surface 3, and 1-20 MHz high frequency voltage 7 is applied to between the installed electrode 7 and an outer electrode 6 installed on the excimer irradiation surface 3, and an excimer beam is applied from the excimer irradiation surface 3.