| 摘要 |
PROBLEM TO BE SOLVED: To manufacture an aligner and an illuminating system in a small size at a low cost. SOLUTION: Light emitted from a light source 11 with relatively low output is selectively sent to the vicinity of exposure processing units 2A-2D by an optical path switching control unit 13 and mirrors 14A-14D. Amplifiers 15A-15D are provided in the vicinity of respective exposure processing units 2A-2D so that the light from the light source 11 is amplified here and made incident to the corresponding exposure processing units 2A-2D. |
