| 摘要 |
PROBLEM TO BE SOLVED: To improve the sensitivity of a solid-state image pickup element by preventing the occurrence of welding between lenses and effectively utilizing the light beams made incident to inlet-lens gap areas. SOLUTION: In a method for manufacturing a solid-state image pickup element, a solid-state image pickup element having a flattened layer 2 on a substrate, on which a plurality of light receiving sections are formed and concave lenses 8 at the boundaries between convex lenses 1 in the upper part of the light receiving section of the flattened layer 2, is manufactured. The concave lenses 8 are formed by forming concave lens forming patterns 10 with a positive resist in the spaces between the convex lenses 1, after forming the lenses 1 and thermally reflowing the resist. Since not only the light beams made incident to the convex lenses 1 are condensed to the light receiving sections, but the light beams made incident to the concave lenses 8 are also made incident to the light receiving sections after the light beams are refracted through the lenses 8, the sensitivity of the solid-state image pickup element is improved, and at the same time, the image pickup element which can reduce smear can be manufactured through a smaller number of processes, as compared with the case where the concave lenses 8 are manufactured through dry etching, etc.
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