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发明名称
SUBSTRATE MEDIA FOR PLASMA GAS PROCESSING REACTORS
摘要
申请公布号
EP1035905(A1)
申请公布日期
2000.09.20
申请号
EP19980938831
申请日期
1998.08.17
申请人
AEA TECHNOLOGY PLC
发明人
SEGAL, DAVID, LESLIE;SHAWCROSS, JAMES, TIMOTHY
分类号
F01N3/28;B01D53/32;B01D53/86;B01D53/94;B01J8/02;B01J19/08;F01N3/08;(IPC1-7):B01D53/32
主分类号
F01N3/28
代理机构
代理人
主权项
地址
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