VIBRATION CONTROL DEVICE,申请号JP19960239013-传众专利搜索

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发明名称	VIBRATION CONTROL DEVICE
摘要
申请公布号	JPH1089403(A)	申请公布日期	1998.04.07
申请号	JP19960239013	申请日期	1996.09.10
申请人	NIKON CORP	发明人	HAYASHI YUTAKA
分类号	F16F15/00;F16F15/02;G03F7/20;H01L21/027;(IPC1-7):F16F15/02	主分类号	F16F15/00
代理机构		代理人
主权项
地址

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