Polymer composition and resist material,申请号SG19960011747-传众专利搜索

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发明名称	Polymer composition and resist material
摘要
申请公布号	SG75110(A1)	申请公布日期	2000.09.19
申请号	SG19960011747	申请日期	1996.12.17
申请人	WAKO PURE CHEMICAL INDUSTRIES, LTD.	发明人	URANO FUMIYOSHI;FUJIE HIROTOSHI;OONO KEIJI
分类号	G03F7/004;G03F7/039;(IPC1-7):G03F7/039	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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