发明名称 Fabrication method for semiconductor substrate
摘要 A method for fabricating a semiconductor substrate comprises the steps of employing a diffusion method to diffuse, in a silicon substrate, an element, which is capable of controlling a conductive type, and to form a diffused region, forming a porous layer in the diffused region, forming a non-porous single crystal layer on the porous layer, bonding the non-porous single crystal layer to a base substrate, while an insulation layer is provided either on a surface to be bonded of the non-porous single crystal layer or on a surface to be bonded of the base substrate, and removing the porous layer.
申请公布号 US6121112(A) 申请公布日期 2000.09.19
申请号 US19960693795 申请日期 1996.07.31
申请人 CANON KABUSHIKI KAISHA 发明人 SAKAGUCHI, KIYOFUMI;YONEHARA, TAKAO
分类号 H01L21/762;(IPC1-7):H01L21/76 主分类号 H01L21/762
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