ULTRASONIC CLEANING DEVICE AND WET-PROCESS NOZZLE FITTED WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning device capable of easily adjusting ultrasonic radiation efficiency and also to provide a wet-process nozzle fitted with the device. SOLUTION: This device is provided with: a first casing 11 the central part of which is recessed and the upper peripheral edge 11b of which is formed into an eaves-like shape; a second casing 12 by which the first casing 11 is surrounded and also, the central part of which is recessed and the upper peripheral edge 12b of which is formed into an eaves-like shape, similarly to the first casing 11; a void space 14 which is formed between the first casing 11 and the second casing 12 by interposing a packing 13 between the edge 11b of the first casing 11 and the edge 12b of the second casing 12 and bolting the interposed packing 13 with bolts 18 and nuts 19, and filled with deaerated water 15 for preventing heating of the device in a dried state from being caused; an ultrasonic vibrator 16 placed on the surface of the recessed central part; and further a weight 17 which is placed on a wall surface 12c of the second casing 12 and used for preventing vibration of the wall surface 12c from being caused. Thus, since vibration of the wall surface 12c of the second easing 12 is inhibited from being caused by the weight 17, the vibration energy is returned in the direction toward a bottom surface 12a of the central part of the casing 12 through the deaerated water 15 and efficiently radiated as ultrasonic waves from the bottom surface 12a.