| 摘要 |
PURPOSE: A thin film actuated mirror array is to ensure the stable drive of an actuator by intercepting the influence of an adjacent pixel. CONSTITUTION: The first MOS transistor(10a) is formed on a substrate. The second MOS transistor(10b) is formed adjacent to the first MOS transistor. A gate member includes a gate(118a) of the first and second MOS transistors and a gate pad(137a) integrated with the gate of the first and second MOS transistors. A gate line(136a) is electrically connected to the gate member. A source line(132a) is electrically connected to a source(114a) of the first MOS transistor. The first drain pad(134a) is electrically connected to a drain(116a) of the first MOS transistor. The first drain pad is electrically connected to a lower electrode. An actuator includes a support layer, the lower electrode, a deformation layer, an upper electrode, and a mirror. A source pad is electrically connected to the upper electrode of the actuator and the source of the second MOS transistor. The second drain pad(139) is electrically connected to the drain of the second MOS transistor.
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