| 摘要 |
PURPOSE: A method for manufacturing an insulation layer and a wiring structure is to provide an insulation layer structure having a low permittivity by forming a uniform and repeatable air gap in the insulation layer. CONSTITUTION: A method for manufacturing an insulation layer structure having an air gap comprises the steps of: forming a first insulation layer; forming a plurality of trenches by transforming the first insulation layer; and forming the air gap in the insulation layer by forming a second insulation layer to fill up the surface of the trench.
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