发明名称 |
SEMICONDUCTOR CHIP PACKAGE AND FABRICATION METHOD THEREOF |
摘要 |
A semiconductor chip package and a fabrication method thereof can reduce fabrication time and cost by consecutively fabricating a semiconductor chip to the package at a wafer level. The method for fabricating the semiconductor chip package includes a step of forming the semiconductor chip having a plurality of pads at its upper portion on a wafer, a step of forming a low elastic modulus material layer 22, such as a silicone on the wafer except the pads by a spin coating process or a sputtering process, a step of forming metal patterns on the pads and the low elastic modulus material layer by a metal thin film deposition process or a photo lithography process, a step of forming a high elastic modulus material layer on the metal patterns and the low elastic modulus material layer, a step of partially exposing the upper portions of the metal patterns, and a step of boding electric media to the exposed metal patterns. |
申请公布号 |
KR100266698(B1) |
申请公布日期 |
2000.09.15 |
申请号 |
KR19980021939 |
申请日期 |
1998.06.12 |
申请人 |
HYUNDAI MICRO ELECTRONICS CO., LTD. |
发明人 |
PARK, ICK SEONG;KANG, IN SOE |
分类号 |
H01L23/12;C08L79/08;H01L21/60;H01L21/768;H01L23/31;H01L23/48 |
主分类号 |
H01L23/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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