摘要 |
PROBLEM TO BE SOLVED: To improve an availability factor by making a plurality of adjacent conveying means, which are provided along a conveyance path on which IC modules are conveyed to idle positions provided between a plurality of measurement sections, movable. SOLUTION: A measurement section is constituted of first through third measurement sections 3a-3c and idle positions 4. Sockets 5a-5c connecting digital transmission light receiving modules 1a-1g are provided at each of the measurement sections 3a-3c. A hand 7 with an openable/closeable finger 6 at the tip is provided at each of the measurement sections 3a-3c, and the hand 7 can be moved reciprocally to the sockets 5a-5c. Measuring fibers 8a-8c are liftably provided above the sockets 5a-5c. Comb-like carriers each formed with recesses 9 at the prescribed pitch for conveying the light receiving modules 1a-1g are provided at opposite positions on a rail 2. The carriers are divided into a first carrier 10 and a second carrier 11 and are moved in the X-Y-Z direction by a driving device.
|