| 摘要 |
PROBLEM TO BE SOLVED: To make the device more small-sized and lower in price by forming a movable part and a pivot part, on which the movable part is so pivoted as to swing, in one body, providing a mirror on the top surface side of the movable part, and also providing a driving coil on the reverse surface side of the movable part. SOLUTION: The movable part 12 and the pivot part on which the movable part 12 is pivoted so that it swings are formed in one body. On the top surface of the movable part 12, the mirror 14 is formed by, for example, aluminum vapor deposition (A). On the reverse side of the movable part 12, the driving coil 15 of, for example, a copper thin film is formed by using an electroforming coil method (B). On the reverse side of a silicon substrate 11, a couple of electrode terminals 16A and 16B are formed by an electroforming coil method, etc., as well as the driving coil 15. Thus, the mirror 14 is formed on the top surface of the movable part 12 and the driving coil 15 is formed on the reverse side of the movable part 12, so the area of the movable part 12 is reduced on condition that the area of the mirror 14 is equal as compared with a case wherein a mirror and a driving coil are formed only on the top surface side of a movable part like a conventional device, thereby making the optical scanning device small-sized.
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