发明名称 INDUCTOR ELEMENT AND INTEGRATED TRANSFORMER INTENDED PARTICULARLY TO BE INCORPORATED IN HIGH-FREQUENCY CIRCUIT, AND INTEGRATED CIRCUIT INCORPORATING SUCH INDUCTOR ELEMENT OR INTEGRATED CIRCUIT
摘要 PROBLEM TO BE SOLVED: To obtain an inductor element, which has a superior Q-value at a low frequency and works at a high frequency, by providing a quartz substrate layer and an inductor formed of a spirally wound metal strip and using copper having a specific thickness or larger for the metallic strip. SOLUTION: An inductor element 1 is provided with a quartz substrate 2, on which a winding composed of a metallic strip 3 is arranged. The metal strip 3 forming an inductor is formed by using copper and spirally wound so as to form an inductor coil. The thickness of the strip 3 used is >=10μm, close to about 30μm. In addition, the quartz substrate 2 is covered with a polyimide layer, which is arranged between the substrate 2 and strip 3 forming the inductor. Particularly a segment 8, which connects the central part 9 of the spirally wound body to the end section 10 of the strip 3 which becomes one of two connecting terminals, is constituted so that the segment 8 passes through the polyimide layer.
申请公布号 JP2000252125(A) 申请公布日期 2000.09.14
申请号 JP20000047980 申请日期 2000.02.24
申请人 MEMSCAP;PLANHEAD SILMAG PHS 发明人 BASTERES LAURENT;MHANI AHMED;VALENTIN FRANCOIS;KARAM JEAN-MICHEL
分类号 H01F27/28;H01F17/00;H01L21/822;H01L23/64;H01L27/04;(IPC1-7):H01F17/00 主分类号 H01F27/28
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