| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminated piezoelectric actuator which is enhanced in reliability by a method wherein piezoelectric plates and metal sheets are surely bonded together, and cracking is prevented from occurring in the piezoelectric plates. SOLUTION: A laminated piezoelectric actuator is manufactured through a method where ceramic piezoelectric plates 1 and metal sheet 2 which are each formed of alloy such as covar whose main component is Ni-Fe and coated with an Ag metal layer 4 of thickness 1 to 20 μm formed on its both surfaces are alternately laminated, and the laminate is thermocompressed at a temperature of 400 to 700 deg.C under a load of 700 to 2000 kgf, by which the Ag metal layer 4 is pressed into crystal grain boundaries of the surface of the ceramic piezoelectric plate 1, and the ceramic piezoelectric plate 1 and the metal sheet 2 are bonded together into one piece through the intermediary of the Ag metal layer 4. |
