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发明名称
EPITAXIALER REAKTOR HOHER KAPAZITÄT
摘要
申请公布号
DE69033417(T2)
申请公布日期
2000.09.14
申请号
DE19906033417T
申请日期
1990.02.28
申请人
MOORE EPITAXIAL, INC.
发明人
MOORE, M.
分类号
C23C16/44;C23C16/46;C23C16/48;C30B25/02;C30B25/10;H01L21/205;(IPC1-7):C23C16/46
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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