| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable cutting-off of liquid on a substrate simultaneously at the time of pulling up the substrate from treatment liquid, and ensure an even surface treatment for a large sized substrate by additionally providing a substrate conveying means to a treatment tank capable of storing treatment liquid therein, and providing an air knife to a delivery outlet of the tank. SOLUTION: A substrate is held on a substrate cassette 24, then mounted at a fixed position 25 on a conveying means 13, and conveyed to the inside of a device by the means 13. The substrate cassette 24 is held toy a carrying robot 11 and sank in a treatment liquid 17 from a delivery inlet 18 of a treatment tank 16. By repeating the above steps while working a conveying means 14, the cassette 24 reaches a terminal end, and when the cassette 24 is held by a carrying robot 12, air knives 20, 21 mounted to a delivery outlet 19 of the tank 16 work. Thereafter, the substrate held by the cassette 24 is pulled up from a substrate treatment liquid 17 and the liquid on the substrate is cut off simultaneously therewith.</p> |
