发明名称 Device for manufacturing single crystals
摘要 This invention provides a device for manufacturing single crystals provided with an after-cooler that causes an abrupt temperature gradient along the axis of the crystal being lifted. The device according to this invention can further increase the lifting speed of single crystals. The after-cooler (4) is disposed between the single crystal (5) being lifted and the heat-shield plate (1). Both the inner surface facing the single crystal (5) and the outer surface facing the heat-shield plate (1) of the after-cooler have a surface emissivity value larger than 0.6. Furthermore, the after-cooler (4) is made of cooling pipes or cooling jackets, and the surfaces of the after-cooler (4) are treated by oxidizing or nitriding so as to increase their emissivity values.
申请公布号 US6117402(A) 申请公布日期 2000.09.12
申请号 US19990287232 申请日期 1999.04.06
申请人 KOMATSU ELECTRONIC METALS CO., LTD. 发明人 KOTOOKA, TOSHIROU;SHIMANUKI, YOSHIYUKI;KAMOGAWA, MAKOTO
分类号 C30B15/00;C30B15/14;H01L21/208;(IPC1-7):B01D9/00;C30B35/00 主分类号 C30B15/00
代理机构 代理人
主权项
地址