| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a multilayer film spectral element for analyzing fluorescent X rays of carbon that enables highly accurate analysis of fluorescent X rays of carbon (C). SOLUTION: Iron (Fe) and carbon (C) are used for a reflecting layer 31 and a spacer 32 respectively, a period length is set at between 7.0 nm and 10.0 nm inclusive and the number of pairs of layers is fixed at between 18 and 25 inclusive. A multilayer spectral element 3 where the outermost surface of the multilayers ends with a carbon (C) layer 32 ensures the strength of analysis that is almost equal to that of a conventional Ni/C multilayer spectral element in comparison of the former with the latter, and makes it possible to obtain the improvement in a ratio of measurement strength (P) to background strength (B) by about 70% and the about 86% increase in a half-value width.</p> |
