发明名称 INSPECTION SYSTEM OF IMAGE FORMATION DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To reduce producing process time by optimizing inspection items in the producing process of an image formation device using a surface conductive type electron emission element. SOLUTION: This system includes a first step provided with a first selection means S100 for selecting inspection elements in panel, a first inspection means S101 for the selected elements, a determination means S102 for determining the quality of the panel based on its result, and a decision means S104 for deciding between a first inspection procedure for performing the inspection of the panel throughout all the elements in the next inspection process or a second inspection procedure for performing the inspection of elements in a partial region with high priority, based on the result of the determination means, and a second step provided with a second selection means S105 for selecting measurement elements in the panel selected, based on the first inspection procedure or the second inspection procedure decided by the decision means, a second inspection means S106 for performing the inspection for the selected elements, and a determination means S107 for determining whether or not the panel should be transferred to the successive panel manufacturing process based on the measurement result.</p>
申请公布号 JP2000243288(A) 申请公布日期 2000.09.08
申请号 JP19990045641 申请日期 1999.02.24
申请人 CANON INC 发明人 TAKEGAMI TAKESHI
分类号 H01J9/42;H01J9/02;H01J31/12;(IPC1-7):H01J9/42 主分类号 H01J9/42
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