发明名称 ETCHING TREATMENT EQUIPMENT OF SUBSTRATE FOR PRINTED WIRING BOARD AND ETCHING TREATMENT METHOD USING THE EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide etching treatment equipment capable of effectively manufacturing a printed wiring board excellent in wiring density and wiring precision, and a method for etching a substrate for a printed wiring board by using the equipment. SOLUTION: In a conveyor in which a plurality of carrying roller constituted of shafts and rings larger than the diameter of the shaft are arranged in parallel, the rings fixed to adjacent carrying roles are arranged in an overlapping distance viewed from the axial direction. An etching treatment zone installed so as to cover a substrate for a printed wiring board carried by the conveyor, from above and below, is equipped with an inlet for carrying the substrate carried by the conveyor into the etching zone, an outlet for carrying out the substrate, a plurality of blow-off holes for blowing off gas from above the substrate and a plurality of sprays for spraying etching liquid against the substrate from below.
申请公布号 JP2000244099(A) 申请公布日期 2000.09.08
申请号 JP19990044026 申请日期 1999.02.23
申请人 HITACHI CHEM CO LTD 发明人 TAKIZAWA TSUNAICHI;ISHIKAWA KOJI
分类号 H05K3/06;C23F1/08;(IPC1-7):H05K3/06 主分类号 H05K3/06
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