| 摘要 |
<p>An angular velocity sensor in which vibration having a large amplitude and resembling a linear movement is generated and which has a high sensitivity. The sensor comprises a tuning fork (11). The tuning fork (11) serves as a vibrator and includes an inertia transducing part provided with driving electrodes (2, 3, 4, 5) for imparting vibration and a Coriolis force detecting part provided with detecting electrodes (9, 10). The tuning fork (11) is made of a piezoelectric body having a perovskite crystal structure expressed by formula ABO3 and containing an additive of 0.1 to 1.0 wt% of MnO2.</p> |
