发明名称 Metal layer etching, especially for circuit board manufacture, is carried out in a spray etching unit using spray interruption durations conforming to the desired etching depth of different thickness layers
摘要 Metal layer etching in a spray etching unit, using spray interruption durations conforming to the desired etching depth of different thickness layers, is new. An Independent claim is also included for an etching unit for carrying out the above process.
申请公布号 DE19908960(A1) 申请公布日期 2000.09.07
申请号 DE19991008960 申请日期 1999.03.02
申请人 ROBERT BOSCH GMBH 发明人 BUECHELER, GERHARD
分类号 C23F1/00;C23F1/08;H05K3/06;(IPC1-7):C23F1/00 主分类号 C23F1/00
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