PROCESS FOR PREPARING METAL OXIDE SLURRY SUITABLE FOR SEMICONDUCTOR CHEMICAL MECHANICAL POLISHING,申请号EP19990909365-传众专利搜索

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发明名称	PROCESS FOR PREPARING METAL OXIDE SLURRY SUITABLE FOR SEMICONDUCTOR CHEMICAL MECHANICAL POLISHING
摘要
申请公布号	EP1032615(A1)	申请公布日期	2000.09.06
申请号	EP19990909365	申请日期	1999.03.19
申请人	CHEIL INDUSTRIES INC.	发明人	LEE, KIL, SUNG;LEE, JAE, SEOK;KIM, SEOK, JIN;CHANG, TU, WON
分类号	C09G1/02;C09K3/14;H01L21/304;(IPC1-7):C09G1/02	主分类号	C09G1/02
代理机构		代理人
主权项
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