MICROELECTRODE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a high-performance microelectrode capable of detecting such problems as the breakage or severance of wire of through electrodes and wiring layers and to provide its manufacturing method. SOLUTION: This microelectrode provided with multiple wiring layers 6 has trouble detecting wiring layers 7 near the wiring layers 6. The manufacturing method of the microelectrode has a process for forming the trouble detecting wiring layers 7 near the wiring layers 6 concurrently with a process for forming the wiring layers 6 in the microelectrode having multiple wiring layers 6.