| 摘要 |
<p>PROBLEM TO BE SOLVED: To make a change in substrate surface energy difficult to occur during storage by constituting an internal surface of a container using a material with a volatilization quantity of organic compound at a normal temperature of a specific value or less. SOLUTION: An internal surface of a container 1 is constituted using a material whose volatilization quantity of organic compound at a normal temperature is 0.2 pg/s or less. Though the material with the volatilization quantity of organic compound at a normal temperature is not specifically limited, glass, metal particularly stainless steel, and ceramic may be preferably used. The storage container 1 having an internal surface constituted of such a member has an extremely small quantity of volatilization of an organic compound at a normal temperature, and a change in surface energy on a stored substrate is also small. Thus the storage container 1 which is inexpensive and simply structured and is free from a change in surface energy of a stored material can be obtained. In addition, by providing a moving means such as a caster 2 on the container 1, the container can be smoothly transferred during each process or between respective processes.</p> |
