| 摘要 |
PURPOSE: A XY stage using a linear step motor and a system of controlling the same are provided to minimize an error to be produced due to the mechanical friction. CONSTITUTION: A XY stage comprises a movable member(310) capable of a linear stepping movement and a slight rotation and having an inductor for producing a magnetic force opposite to a direction of applied current, and a fixing member(320) with a number of bosses in regular interval for moving the movable member. The movable member includes X-axis inductors producing a force in a X-axis direction, and Y-axis inductors producing a force to in a Y-axis direction. The X and Y-axis inductors have a permanent magnet and an electromagnet, respectively. A surface of the fixing member is formed with regularly spaced teeth for forming a magnetic path. The fixing member has a number of regularly spaced teeth, and a ferromagnetic base(322).
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