摘要 |
PROBLEM TO BE SOLVED: To reduce invalid electric power based on the charged power and to make the efficiency of ozone generation good. SOLUTION: This ozonizer having ceramic dielectric layers 102 and 103 arranged in a pair of frames 108 and 109, and generating ozone gas by supplying a raw material gas to a discharge space 112 sandwiched by the dielectric layers 102 and 103, and generating silent discharge in the discharge space 112, has a partition wall 115 having a wall face along the direction of the gas flow flowing in the discharge space 112 as a gas flow-controlling means for introducing the raw material gas to the portion at which the silent discharge is generated in the discharge space 112, and equating the gas flow in the discharge space 112.
|