| 摘要 |
PURPOSE: A position controlling system(100) is provided to precisely control the position of a driving shaft by installing a position sensor(102) in a driving part and preventing a wafer from breaking. CONSTITUTION: A position controlling system of driving shaft(100) by using a sensor(102) comprises a pulse generator(10) producing a pulse signal as an external instructive signal, an operator(100) producing output an operating signal after comparing a pulse signal produced by pulse generator(10) with a feedback signal, a motor(12) circulating by the operating signal, a transfer device(13) moving as a turning force, a position sensor(102) sensing a position of the transfer device(13), a sensor converter(101) converting the signal receiving a position value from a position sensor to a moving distance of a transfer device(13), wherein after setting a pulse value received from a pulse generator(10) to a reference value, the operator(100) operates a motor(12) and then the transfer device(13) moves as the number of turn in motor.
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