Detecting structured substrates defects involves scanning charged particle beam over substrate with optical column stationary w.r.t. surface, comparing detected images with reference

摘要

The method involves positioning a charged particle optical column (600) relative to a structured substrate (622), whereby the column has a field of view with an essentially uniform resolution; the column is activated to detect images over many sub-surfaces of an area of the structured substrate within the field of view by scanning a charged particle beam over the substrate, whereby the column is held stationary w.r.t.. the surface; and the detected images are compared with a reference to identify defects in the substrate. An Independent claim is also included for detecting defects in structured substrates.